Multi-probe friction wear test and in-situ morphology detection system in vacuum

一种真空下多探针摩擦磨损测试及原位形貌探测系统

Abstract

The invention discloses a multi-probe friction wear test and in-situ morphology detection system in vacuum. The system includes a main body and an external manual driving device; the main body includes a cavity upper cover, a light window top cover mounted in the cavity upper cover and for sealing, and multiple probe components installed in the upper cover of the cavity. The system can realize switch of SPM probes with different functions, complete tribological test and in-situ morphology detection in high vacuum environment one after another, and reach high in-situ localization accuracy. The probe change does not need opening of the cavity, so as to ensure that the experimental sample is not interference by the external factors, and that the experiment results are more authentic. Besides, the system saves the previous calibration adjustment time for experiment equipment, and improves the efficiency.
本发明公开了一种真空下多探针摩擦磨损测试及原位形貌探测系统,包括主体和外部手动驱动装置;所述主体包括腔体上盖、安装在腔体上盖上面用于密封的光窗顶盖和安装腔体上盖内部的多探针组件;其能在高真空下实现对具有不同功能的SPM针尖切换,使摩擦学测试及原位形貌探测在高真空环境下可相继完成,且原位定位精度较高。由于更换针尖时无须打开腔体,确保了实验样品不受外界因素干扰,使实验所得结果更为真实可信;不仅如此,也节省了实验前期设备调整校准时间,提高实验效率。

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Cited By (1)

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    CN-105606477-AMay 25, 2016西南交通大学, 朱旻昊, 彭金方, 万幸芝, 蔡振兵, 刘新龙, 林映武, 张晓宇, 莫继良, 章武林, 刘曦洋可原位进行x射线光电子能谱分析的微动磨损试验装置